Microstructural and Electrical Properties of ZrO2 Thin Films prepared on Silicon on Insulator with Thin Top silicon 期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

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Microstructural and Electrical Properties of ZrO2 Thin Films prepared on Silicon on Insulator with Thin Top silicon

摘要：
关键词：	薄膜 SOI 电特性微结构