Institution: | 1. FIT – Freiburg Centre for Interactive Materials and Bioinspired Technology, University of Freiburg, Freiburg, 79110 Germany
Laboratory for Sensors, IMTEK – Department of Microsystems Engineering, University of Freiburg, Freiburg, 79110 Germany;2. Laboratory for MEMS Applications, IMTEK – Department of Microsystems Engineering, University of Freiburg, Freiburg, 79110 Germany;3. Laboratory for MEMS Applications, IMTEK – Department of Microsystems Engineering, University of Freiburg, Freiburg, 79110 Germany
Hahn-Schickard, Freiburg, 79110 Germany;4. Laboratory for Sensors, IMTEK – Department of Microsystems Engineering, University of Freiburg, Freiburg, 79110 Germany
FMF - Freiburg Materials Research Centre, University of Freiburg, Freiburg, 79104 Germany;5. Department of Bioengineering, Imperial College London, London, SW7 2AZ UK;6. Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and The Barcelona Institute of Science and Technology, Barcelona, 08193 Spain
ICREA, Barcelona, 08010 Spain;7. FIT – Freiburg Centre for Interactive Materials and Bioinspired Technology, University of Freiburg, Freiburg, 79110 Germany |