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Quasi-Ordered Nanoforests with Hybrid Plasmon Resonances for Broadband Absorption and Photodetection
Authors:Mao Li  Meng Shi  Bin Wang  Chenchen Zhang  Shuai Yang  Yudong Yang  Na Zhou  Xin Guo  Dapeng Chen  Shaojuan Li  Haiyang Mao  Jijun Xiong
Affiliation:1. Institute of Microelectronics of Chinese Academy of Sciences, Beijing, 100029 P. R. China

University of Chinese Academy of Sciences (UCAS), Beijing, 100049 P. R. China;2. Institute of Microelectronics of Chinese Academy of Sciences, Beijing, 100029 P. R. China;3. University of Chinese Academy of Sciences (UCAS), Beijing, 100049 P. R. China

State Key Laboratory of Applied Optics, Changchun Institute of Optics Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033 P. R. China;4. Institute of Microelectronics of Chinese Academy of Sciences, Beijing, 100029 P. R. China

National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, 030051 P. R. China;5. National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, 030051 P. R. China;6. Institute of Microelectronics of Chinese Academy of Sciences, Beijing, 100029 P. R. China

University of Chinese Academy of Sciences (UCAS), Beijing, 100049 P. R. China

Wuxi Internet of Things Innovation Center Co., Ltd., Wuxi, 214001 P. R. China;7. State Key Laboratory of Applied Optics, Changchun Institute of Optics Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033 P. R. China

Abstract:With the continuing development of green energy technology, solar energy is the most widely distributed and easily utilized form of energy in nature. High-absorption absorbers over a wide spectrum range are beneficial for solar energy harvest. Herein, a fast and efficient method is developed to fabricate a broadband absorber consisting of quasi-ordered nanoforests and metal nanoparticles using a simple plasma bombardment process on a 4-inch silicon wafer, offering high throughputs that can meet practical application demands. The absorber exhibits high absorption exceeding 90% from 300 to 2500 nm, good absorption stability with negligible disturbance from the polarization and the incident angle of light. This effective absorption behavior can be ascribed to multilevel hybridization of the plasmon resonances in the hybrid structures and cavity mode resonances inside the nanoforests. Furthermore, the absorber is integrated onto a thermopile for photodetection with largely enhanced photoresponse from 532 to 2200 nm. The photoinduced voltage of the devices shows a large increment of 433% at 100 mW cm−2 light power density, in comparison with a contrast pristine thermopile. It is expected that such a broadband absorber holds great potential for multiple applications, including solar steam generation, photodetection, and solar cells.
Keywords:broadband photodetectors  hybrid plasmon resonances  light trapping  plasma bombardment process  quasi-ordered nanoforests
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