Liquid Droplet Stamp Transfer Printing |
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Authors: | Xin Liu Yu Cao Kunwei Zheng Yingchao Zhang Zhouheng Wang Yihao Chen Ying Chen Yinji Ma Xue Feng |
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Institution: | 1. Department of Engineering Mechanics, Tsinghua University, Beijing, 100084 China
Center for Flexible Electronics Technology, Tsinghua University, Beijing, 100084 China;2. Institute of Flexible Electronics Technology of THU, Jiaxing, 314000 China
Qiantang Science and Technology Innovation Center, Hangzhou, 310016 China;3. Department of Engineering Mechanics, Tsinghua University, Beijing, 100084 China |
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Abstract: | Despite the increasingly significant role of flexible electronics in information, energy, and medical treatment, their integration with a special-shaped interface remains an unresolved challenge. The traditional transfer method, as a core technology of device integration, is still unsuitable for thinned chips and 3D sensors. Solid-contact elastomer stamp sometimes causes cracks while non-contact method such as sacrificial layer method fails to achieve precise positioning transfer. Herein, the authors present liquid droplet stamp transfer printing (LSTP) with a high yield ratio which allows flexible devices to be transferred form silicon wafer to complex special-shaped interfaces. Following the transfer scheme, the regulation of interface force is demonstrated with different thin-film patterns. Besides, the liquid droplet stamp is designed as an efficient tool to transfer thinned inorganic flexible chips. A thinned micro light emitting diode, extensively used in large-scale manufacturing of flexible circuits, is transferred and lighted successfully. In addition, a new method to fabricate 3D sensors is proposed with the liquid droplet stamp, which provides a new way of manufacturing wearable antenna and reconfigurable devices. Consequently, the LSTP has great potential for future sophisticated and system-level flexible devices transfer printing and plays a vital role in the research of 3D flexible electronics. |
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Keywords: | flexible devices liquid droplet stamp transfer printing transfer printing principal trans-scale devices three-dimensional devices |
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