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| 多晶硅铸锭炉加热室的设计 | |
| 引用本文： | 陈国红,王晓军,姚文军,苏文生.多晶硅铸锭炉加热室的设计[J].电子工业专用设备,2007,36(7):36-39. |
| 作者姓名： | 陈国红 王晓军 姚文军 苏文生 |
| 作者单位： | 1. 国防科学技术大学研究生院,湖南长沙,410073;中国电子科技集团公司第四十八研究所,湖南长沙,410111 2. 湖南证兴设备安装工程有限公司,湖南株洲,412003 3. 中国电子科技集团公司第四十八研究所,湖南长沙,410111 |
| 摘 要： | 加热室是多晶硅铸锭炉的关键部件之一。多晶硅锭的生长工艺过程都要通过加热室的调整来实现。着重介绍了多晶硅铸锭炉加热室的结构设计。 |
| 关 键 词： | 多晶硅铸锭炉 加热室 石墨加热器 隔热层 |
| 文章编号： | 1004-4507（2007）07-0036-04 |
| 修稿时间： | 2007-05-25 |
Design about the Heating Chamber of Polycrystalline Silicon Ingot Production Furnace |
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| CHEN Guo-hong,WANG Xiao-jun,YAO Wen-jun,SU Wen-sheng.Design about the Heating Chamber of Polycrystalline Silicon Ingot Production Furnace[J].Equipment for Electronic Products Marufacturing,2007,36(7):36-39. | |
| Authors: | CHEN Guo-hong WANG Xiao-jun YAO Wen-jun SU Wen-sheng |
| Institution: | 1, Graduate College of National Defence and Technology University Changsha 410073, Hunan ; 2, Hunan Zhengxin equipment installation engineering co; Ltd. Zhuzhou 412003, Hunan ;3, The 48th Research Institute of China Electronic Technology Group Company, Changsha 410111, Hunan |
| Abstract: | Heating chamber is pivotal part of the polycrystalline silicon ingot production furnace. Technique process of growth of the polycrystalline silicon is based on the adjustment of the heating chamber. This paper mainly introduce the structure design about the heating chamber of the polycrystalline silicon ingot production furnace. |
| Keywords: | Polycrystalline silicon ingot production furnace Heating chamber Graphite heaters Thermal insulation |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |