Kinetic rules of precipitation of thin films of titanium dioxide from the gas phase containing titanium tetraisopropylate

Precipitation of titanium dioxide layers from the gas phase in the reaction system containing titanium tetraisopropylate and oxygen at the total pressure 1 kPa is studied. It is shown that in the range of 300–500°C the precipitation proceeds in the kinetic regime and is accompanied by the formation of layers of monotonous thickness containing nanocrystalline phases of anatase and rutile. In the temperature range 300–350°C the activation energy value was 92.7 kJ mol^?1, and at higher temperatures (up to 500°C) it decreased to 17.5 kJ mol^?1. The increase in the precipitation temperature caused the increase in relative amount of rutile in the precipitated layers.