Sputtered neutral mass spectrometry (SNMS) as a tool for chemical surface analysis and depth profiling |
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| Authors: | H Oechsner and E Stumpe |
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| Institution: | (1) Physikalisches Institut, Technische Universit?t, D-3392 Clausthal-Zellerfeld, Fed. Rep. Germany |
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| Abstract: | An experimental system for mass spectrometry of supttered neutral particles involving a hf plasma operated in Ar at several
10−4 Torr is described. The potentialities of the method for quantitative surface analysis are reasoned. Depth profiling by sputtered
neutral mass spectrometry is demonstrated for anodic oxide layers on Nb and Ta. |
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| Keywords: | 79 20 82 65 |
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