Analysis of charge injection processes including ESD in MEMS |
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Authors: | William D. Greason |
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Affiliation: | Applied Electrostatics Research Centre, Faculty of Engineering, University of Western Ontario, London, Ontario, Canada N6A 5B9 |
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Abstract: | The effect of charge injection due to human body model (HBM) electrostatic discharge (ESD), charged device model (CDM) ESD and triboelectrification in capacitive microelectromechanical systems' (MEMS) structures is analyzed. The results show that as feature size is reduced, the effect remains constant for charging by triboelectrification. However, HBM ESD injected charge produces a change which is inversely proportional to the square of the gap separation and CDM ESD injected charge produces a change which is inversely proportional to the square of the plate area. |
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