| 带内孔平面多边形的并算法 |
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| 引用本文： | 陈建辉,薛虹.带内孔平面多边形的并算法[J].微细加工技术,2002(3):28-32,39. |
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| 作者姓名： | 陈建辉 薛虹 |
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| 作者单位： | 中科院电工研究所,北京,100080 |
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| 摘 要： | 电子束曝光机版图切割过程中可能出现带内孔的多边形，并且多边莆内环与外环之间可能发生重叠。针对这种多边形，提出了新的基于矢量边的重复交点处理方法，并在此基础上给出了一个强健的多边形并算法。
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| 关 键 词： | 带内孔 多边形 并运算 版图切割 电子束曝光机 |
| 文章编号： | 1003-8213(2002)03-0028-05 |
A Combination Algorithm for Planar Polygons with Inner Holes |
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| CHEN Jian hui,XUE Hong.A Combination Algorithm for Planar Polygons with Inner Holes[J].Microfabrication Technology,2002(3):28-32,39. |
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| Authors: | CHEN Jian hui XUE Hong |
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| Abstract: | During the layerout cutting process for the e beam lithography system, some polygons with one or more inner holes may appear. And the boundaries of the inner holes may overlap the one of the outer ring.A new method to sort overlapped intersectant points for oriented line segments. Based on it, a robust combination algorithm for this kind of polygons is introduced. |
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| Keywords: | polygon combination algorithm layerout cutting e beam lithography system |
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