| 结构解耦四质量块微陀螺仪的设计与制备 |
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| 引用本文： | 李敏阳,张卫平,谷留涛,刘朝阳,田梦雅.结构解耦四质量块微陀螺仪的设计与制备[J].半导体光电,2020,41(2):177-181. |
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| 作者姓名： | 李敏阳 张卫平 谷留涛 刘朝阳 田梦雅 |
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| 作者单位： | 上海交通大学 电子信息与电气工程学院 微纳电子学系, 微米/纳米加工技术国家级重点实验室, 薄膜与微细技术教育部重点实验室, 上海 200240 |
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| 基金项目： | 国家自然科学基金项目(61574093)；预研基金项目(614280504010317,6140863020202)；上海专业技术服务平台项目(19DZ2291103)；教育部新世纪优秀人才支撑计划项目(NCET-10-0583). |
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| 摘 要： | 提出了一种新型的结构解耦四质量块陀螺仪的结构设计以及制备方法。采用梳齿电极的设计和推挽法消除了静电驱动力的二倍频分量,并对折叠梁结构进行仿真分析和优化,有效地实现了对驱动和检测模态的结构解耦。针对陀螺仪的结构,设计了可行的工艺方案并进行实际加工,采用SOI和阳极键合工艺,最终制作出四质量块陀螺仪样品。仿真得到驱动和检测模态的谐振频率差为7Hz,表明其结构的高度对称性。谐响应分析下陀螺仪最大位移为1 290nm,驱动框架最大位移差为60.75nm,检测框架最大位移为305.24nm,取得了理想的解耦效果。
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| 关 键 词： | 结构解耦 四质量块 阳极键合 SOI 仿真分析 |
| 收稿时间： | 2019/11/26 0:00:00 |
Design and Fabrication of Structure-decoupled Quadruple Mass MEMS Gyroscope |
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| LI Minyang,ZHANG Weiping,GU Liutao,LIU Zhaoyang,TIAN Mengya.Design and Fabrication of Structure-decoupled Quadruple Mass MEMS Gyroscope[J].Semiconductor Optoelectronics,2020,41(2):177-181. |
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| Authors: | LI Minyang ZHANG Weiping GU Liutao LIU Zhaoyang TIAN Mengya |
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| Institution: | National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Department of Micro and Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiaotong University, Shanghai 200240, CHN |
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| Abstract: | A new structure design and preparation method of structure-decoupled quadruple mass gyroscope are proposed. Design of comb electrode and push-pull method are used to eliminate the second harmonic component of the electrostatic driving force, and the structure of folding beam is simulated, analyzed and optimized to effectively realize the structural decoupling of drive mode and sense mode. According to the structure of the gyroscope, a feasible process plan was designed and the practical processing was carried out. Samples of the quadruple mass gyroscope were finally made by using SOI and anode bonding process. Simulation results show that the resonant frequency difference between drive mode and sense mode is 7Hz, which means the structure is highly symmetrical. Through the harmonic analysis, the maximum displacement of gyroscope is 1290nm, the maximum displacement difference of driving frame is 60.75nm, and the maximum displacement of detection frame is 305.24nm, which means that the ideal decoupling effect is obtained. |
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| Keywords: | structure decoupling quadruple mass anode bonding SOI simulation analysis |
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