| TDI图像传感器横向抗晕栅极电压与满阱容量关系研究 |
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| 引用本文： | 曲杨,王欣洋,周泉,常玉春. TDI图像传感器横向抗晕栅极电压与满阱容量关系研究[J]. 半导体光电, 2020, 41(2): 169-172 |
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| 作者姓名： | 曲杨 王欣洋 周泉 常玉春 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所, 长春 130033;中国科学院大学, 北京 100049;长光辰芯光电技术有限公司, 长春 130033;大连理工大学 微电子学院, 大连 116600 |
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| 基金项目： | 国家自然科学基金项目(11975066). |
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| 摘 要： | 时间延时积分CMOS图像传感器(TDI-CIS)具有优良的微光探测能力,可应用于航空探测及卫星遥感等领域。然而,在入射光强较强时,TDI-CIS容易出现光晕(Blooming)现象,影响观测效果。首先分析了光晕产生的机理;然后基于两种传统的抗晕结构,设计出一种具有沿垂直方向布局的长方形横向抗晕栅的TDI-CIS;通过成像实验发现横向抗晕栅极电压与抗晕效果及满阱容量(FWC)之间呈负相关关系;最后通过实验得到所设计TDI-CIS的最优抗晕栅极电压值为2.1V。
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| 关 键 词： | 时间延时积分 CMOS 光晕 横向抗晕栅 满阱容量 |
| 收稿时间： | 2019-12-23 |
Relationship between Voltage of Lateral Anti-blooming Gate and Full Well Capacity in TDI Image Sensor |
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| QU Yang,WANG Xinyang,ZHOU Quan,CHANG Yuchun. Relationship between Voltage of Lateral Anti-blooming Gate and Full Well Capacity in TDI Image Sensor[J]. Semiconductor Optoelectronics, 2020, 41(2): 169-172 |
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| Authors: | QU Yang WANG Xinyang ZHOU Quan CHANG Yuchun |
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| Affiliation: | Changchun Institute of Optics, Fine Mechanics and Physics of the Chinese Academy of Sciences, Changchun 130033, CHN;University of Chinese Academy of Sciences, Beijing 100049, CHN;Gpixel.Incorporation, Changchun 130033, CHN; School of Microelectronics, Dalian University of Technology, Dalian 116600, CHN |
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| Abstract: | Due to its excellent detection ability under low light illumination,time delay integration CMOS image sensor(TDI-CIS)can be applied in aviation detection and satellite remote sensing.However,it is easy to appear blooming phenomenon to affect observation when TDI-CIS is under higher intensity illumination.In this paper,the mechanism of blooming is introduced firstly and a TDI-CIS with rectangle lateral anti-blooming gate which is arranged in vertical direction based on two different anti-blooming structures is designed.Imaging tests indicate that the voltage of anti-blooming gate(VABG)is negatively corrected with anti-blooming and full well capacity(FWC).Finally,the optimal VABGof 2.1 Vis obtained. |
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| Keywords: | TDI CMOS blooming lateral anti-blooming gate FWC |
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