首页 | 本学科首页   官方微博 | 高级检索  
     


Fiber-coupled displacement interferometry without periodic nonlinearity
Authors:Ellis Jonathan D  Meskers Arjan J H  Spronck Jo W  Munnig Schmidt Robert H
Affiliation:PME: Mechatronic System Design, Delft University of Technology, Delft, The Netherlands. j.d.ellis@rochester.edu
Abstract:Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as periodic nonlinearity, and account for fiber-induced drift. In this Letter, we describe a novel, general Joo-type interferometer that inherently has an optical reference after any fiber delivery that eliminates fiber-induced drift. This interferometer demonstrated no detectable periodic nonlinearity in both free-space and fiber-delivered variants.
Keywords:
本文献已被 PubMed 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号