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波带板法检测非球面技术
引用本文:全奉先,辛企明. 波带板法检测非球面技术[J]. 光学技术, 1998, 0(3)
作者姓名:全奉先  辛企明
作者单位:北京理工大学光电工程系
摘    要:总结了在波带板干涉技术检测非球面方面最近的发展和应用,比较了不同方法的优缺点。叙述了用一块改进型波带板检测非球面的原理和方法。还分析了波带板的安装与测量精度的关系。针对干涉条纹在周边弯曲的现象,对波带板的设计进行了改进。最后给出了实验结果。

关 键 词:非球面检测,波带板

Zone plate interferometer for testing aspheric surfaces
Quan Fengxian Xin Qiming. Zone plate interferometer for testing aspheric surfaces[J]. Optical Technique, 1998, 0(3)
Authors:Quan Fengxian Xin Qiming
Abstract:The recent development and application of the technique of using zone plate interferometry to test aspherical surfaces are summaried. The advantages and disadvantages of several types of zone plate interferometer are given. The principle and method for testing aspheric surfaces using a modified zone plate(MZP) are described.The relation between installation of MZP and measurement precision is analyzed. The design of MZP is modified to eliminate the curvature in the border of the interference pattern. At last, some experimental results are given.
Keywords:aspheric surface testing   zone plate.  
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