| 严格耦合波法计算闪耀光栅衍射效率 |
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| 引用本文： | 陈为,廖胜.严格耦合波法计算闪耀光栅衍射效率[J].应用光学,2009,30(5):734-738. |
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| 作者姓名： | 陈为 廖胜 |
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| 作者单位： | 1. 中国科学院研究生院,北京,100039;中国科学院光电技术研究所,四川,成都,610209
2. 中国科学院光电技术研究所,四川,成都,610209 |
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| 基金项目： | 863项目红外辐射谱测量技术研究子课题 |
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| 摘 要： | 针对一般标量近似算法精度不高的问题,提出采用S矩阵的严格耦合波的方法计算光栅衍射效率.通过建立完整的闪耀光栅理论模型,对各分层电磁场进行傅里叶级数展开,采用散射矩阵方法求解各谐波系数,完成衍射效率计算.该方法已应用到红外光栅TE和TM 2种模式衍射效率的计算.分析了散射矩阵解决数值运算不稳定的原因,通过与标量近似计算方法进行比较,说明红外光栅衍射偏振特性.
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| 关 键 词： | 散射矩阵 严格耦合波法 标量算法 偏振特性 |
| 收稿时间： | 2008/12/27 |
Rigorous coupled-wave method for diffraction efficiency calculation of blazed gratings |
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| CHEN Wei,LIAO Sheng.Rigorous coupled-wave method for diffraction efficiency calculation of blazed gratings[J].Journal of Applied Optics,2009,30(5):734-738. |
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| Authors: | CHEN Wei LIAO Sheng |
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| Abstract: | A rigorous coupled-wave (RCW) method, which adopts scattering matrix to calculate the diffraction efficiency of blazed gratings, is proposed to point against the low-accuracy of general scalar approximate algorithm. The calculation of diffraction accuracy was fulfilled by establishing a thorough theoretical model of blazed gratings and solving each harmonic coefficient with scattering matrix. The method has been used for calculating the diffraction accuracy of both TE and TM modes and solving the problem caused by numerical instability. The scalar method based on Beckmann-equation is provided for comparison. |
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| Keywords: | scattering matrix rigorous coupled-wave method scalar algorithm polarization characteristic |
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