电容器薄膜等离子体表面改性实验研究

 建立了一套辉光放电等离子体对电容器薄膜进行表面处理的装置。采用N₂，O₂及Ar三种气体对聚丙烯、聚酯和聚苯硫醚膜进行了表面处理。红外光谱分析表明:薄膜表面的生成物与薄膜种类、气体种类和处理强度密切相关。场扫描电镜显示了薄膜表面的刻蚀现象明显。处理过的薄膜，非晶相被去除，球晶暴露。能谱分析说明了薄膜中C元素下降，N，O元素增加，但总体改变量很小。处理前后薄膜的直流击穿电压没有明显改变，但刻蚀过程造成的薄膜表面粗化可帮助电容器的浸渍过程更充分，从而可提高电容器的使用场强与储能密度。

Experimental study of plasma surface treatment on capacitor film

The paper sets up an installation to produce glow discharge plasma and treat the capacitor film.Three kinds of capacitor films,including PP,PET and PPS films are treated by N2,O2 and Ar plasma.The infrared spectrums show that the change of matter on the film surface is affected by the kind of film,plasma and the treatment strength.The SEM images show apparent corrosions on the treated film surface,which can be explained as that the amorphous component is etched off,and the crystal grains are exposed.Energy spectrum analysis indicates that element of C decreases a little,while N and O increase slightly.The DC Breakdown voltages of treated and untreated films are nearly the same.However,the corrosion of the film surface due to the plasma treatment will make the immersion of film more effective,which can improve the working field strength as well as the storage energy density of the capacitors.