High-performance single fundamental mode AlGaAs VCSELs with mode-selective mirror reflectivities

We present inverted surface relief vertical-cavity surface-emitting lasers (VCSELs) showing a side-mode suppression ratio above 30 dB up to maximum optical output powers of 6.3 mW and differential quantum efficiencies exceeding 90%. An evaluation of 160 relief devices on a sample incorporating graded layers yields 157 lasers with single-mode output powers of at least 2.9 mW, proving the high effectiveness of the technique despite the comparatively simple manufacture.