空间干涉式MOEMS陀螺的实验研究

提出一种基于微镜构成的空间螺旋光路的干涉式MOEMS陀螺,并对其进行了原理验证实验研究。此种光路结构中光束在自由空间传播,可减少损耗;无耦合问题,无背向散射;无运动部件,并且可利用微光机电工艺进行加工。在理论分析的基础上,通过实验设计,利用锁相放大器等对处于一定转速转台上陀螺的输出信号进行检测,得到的转台转速与实际转速比较结果非常接近,实现了陀螺的Sagnac效应原理验证,零漂8.16(°)/h。

Experimental study on interferometric MOEMS gyroscope using spatial light paths

An interferometric MOEMS(Micro-Opto-Electro-Mechanical Systems) gyroscope was presented which has spatial helical optical structure composed of micromirrors.The experiment for proving its principle was made.The light traveled in free space,which could reduce light loss.The gyroscope had no coupling problem,no back scatter,no movable parts,and could be manufactured by MOEMS techniques.Based on theoretical analysis and experiment design,the output signals of the gyroscope on rotate platform were measured using lock-in amplifier etc.The results show that the measured rotation speeds from the turntable were close to that of actual system,and the bias stability of the gyroscope system was up 8.16(o)/h.So the principle of Sagnac effect was proved.