| 聚酰亚胺上催化剂增强化学气相沉积钯-铂双层膜 |
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| 引用本文： | 郑建华,周锦兰,俞开潮,葛学贵,于澍燕.聚酰亚胺上催化剂增强化学气相沉积钯-铂双层膜[J].催化学报,2006,27(6):465-467. |
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| 作者姓名： | 郑建华 周锦兰 俞开潮 葛学贵 于澍燕 |
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| 作者单位： | 中国地质大学材料科学与化学工程学院,湖北武汉,430074;华中科技大学化学系,湖北武汉,430074;中国科学院化学研究所高分子物理与化学国家重点实验室,北京,100080 |
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| 摘 要： | 以N2和O2为载气,采用催化剂增强化学气相沉积法于聚酰亚胺上获得了Pt和Pd-Pt双层金属薄膜. 当使用Pd(hfac)2和PtMe2(COD)为前驱体,在同一反应器内共沉积时,只有Pt被沉积. 金属Pd和Pt顺序沉积可形成Pd-Pt双层膜.
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| 关 键 词： | 催化剂增强化学气相沉积 聚酰亚胺 铂膜 钯-铂双层膜 |
| 文章编号： | 0253-9837（2006）06-0465-03 |
| 收稿时间： | 01 13 2006 12:00AM |
| 修稿时间： | 2006-01-13 |
Catalyst-Enhanced Chemical Vapor Deposition of Palladium-Platinum Bilayer Films on Polyimide |
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| ZHENG Jianhua,ZHOU Jinlan,YU Kaichao,GE Xuegui,YU Shuyan.Catalyst-Enhanced Chemical Vapor Deposition of Palladium-Platinum Bilayer Films on Polyimide[J].Chinese Journal of Catalysis,2006,27(6):465-467. |
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| Authors: | ZHENG Jianhua ZHOU Jinlan YU Kaichao GE Xuegui YU Shuyan |
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| Institution: | 1.Department of Material Science and Chemical Engineering, China University of Geosciences, Wuhan 430074, Hubei, China ; 2. Department of Chemistry, Huazhong University of Science and Technology, Wuhan 430074 , Hubei , China ; 3. State Key Laboratory of Polymer Physics and Chemistry, Institute of Chemistry, The Chinese Academy of Sciences, Beijing 100080, China |
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| Abstract: | Catalyst-enhanced chemical vapor deposition of Pt and Pd-Pt bilayer films on polyimide using N_2 and O_2 as the carrier gases was studied. When the mixture of Pt complex and Pd complex was used as precursors in the same chamber for co-deposition of Pd and Pt, only Pt was deposited. Sequential deposition of Pd and Pt metals formed Pd-Pt bilayer films. |
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| Keywords: | catalyst-enhanced chemical vapor deposition polyimide platinum film palladium-platinum bilayer film |
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