Generation of a uniform high-density microwave plasma for CO2 lasers using orthogonal electric fields |
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Authors: | K. Saito M. Kimura T. Uchiyama |
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Affiliation: | (1) Matsushita Electric Industrial Co., Ltd., 3-4 Hikaridai, Seika-cho, Soraku-gun, Kyoto 619-0237, Japan;(2) Matsushita Welding Systems Co., Ltd., 3-1-1 Inazu-cho, Toyonaka City, Osaka 561-0854, Japan;(3) Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kouhoku-ku, Yokohama City, Kanagawa 223-8522, Japan |
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Abstract: | To realize a CO2 laser using a fast-axial-flow high-output-power microwave discharge excitation, we devised a technology for making the microwave discharge uniform by varying the oscillation direction of an electric field with time. We also verified the effectiveness of this technology. As a result, we succeeded in increasing the discharge uniformity to 70% of the laser-tube cross-sectional area and realized a high laser output power and a high laser efficiency. In the case of a microwave input power of 1450 W, a maximum laser output power of 273 W and a laser efficiency of 18.8% were achieved; in the case of a microwave input power of 1070 W, a laser output power of 214 W and a laser efficiency of 20.0% were achieved. At the time of maximum output power, a high input power density of 280 W/cm3, which is approximately 20 times that in a dc discharge method, was achieved. Thus, a high-output-power microwave-discharge-excited CO2 laser has become feasible. PACS 42.60.By; 52.80.Pi |
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