An X-ray double-crystal method utilizing non-parallel setting for measuring local lattice mismatches between epitaxial films and substrates

An X-ray topographic method utilizing non-parallel (+,-) setting for measuring lattice mismatches between epitaxial films and substrates is reported. This method gives quantitative as well as topographical information on lattice distortions in a distorted crystal and allows us to study any reflection from various crystals, in which the fractional variation of lattice spacing, δd/d, is of the order of 10^-4?10^-5. Examples of applications are lattice mismatches between epitaxial magnetic garnet films and (111) gadolinium garnet (GGG) substrates. The spacing of the epitaxial film was slightly larger along the [111] direction than that of the substrate and the apparent crystal symmetry of the epitaxial film is rhombohedral.