| 烷基苯磺酸作用下环化聚异戊二烯-双叠氮型感光性高分子光交联产物的降解反应 |
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| 引用本文： | 黄骏廉,孙猛. 烷基苯磺酸作用下环化聚异戊二烯-双叠氮型感光性高分子光交联产物的降解反应[J]. 高分子学报, 1988, 0(4): 305-308 |
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| 作者姓名： | 黄骏廉 孙猛 |
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| 作者单位： | 复旦大学材料科学研究所 上海(黄骏廉)，复旦大学材料科学研究所 上海(孙猛) |
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| 摘 要： | <正> 环化聚异戊二烯-双叠氮型感光性高分子是一类应用广泛的负性光致抗蚀剂。关于它的光交联反应机理,许多人曾进行过研究,但是当这种具有三维网络结构的光交联聚合物完成其抗蚀使命后,怎样把它干净、彻底地从被涂表面去掉,是微细加工中急待解决的问题。常用的溶剂浸泡、高温加氧灼烧和等离子氧去胶法都存在着这样或那样的问题
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| 关 键 词： | 烷基苯磺酸 双叠氮化合物 环化聚异成二烯 光交联 降解反应 |
| 收稿时间： | 1987-07-07 |
THE EFFECT OF p-ALKYL BENZENE SULFONIC ACIDS ON THE DEGRADATION REACTION OF PHOTOSENSITIVE POLYMER OF CYCLIZED POLYISOPRENE DIAZIDE SYSTEM |
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| HUANG Jun-lian,SUN Meng. THE EFFECT OF p-ALKYL BENZENE SULFONIC ACIDS ON THE DEGRADATION REACTION OF PHOTOSENSITIVE POLYMER OF CYCLIZED POLYISOPRENE DIAZIDE SYSTEM[J]. Acta Polymerica Sinica, 1988, 0(4): 305-308 |
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| Authors: | HUANG Jun-lian SUN Meng |
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| Affiliation: | Institute of Material Science; Fudan University; Shanghai |
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| Abstract: | In the presence of alkyl benzene sulfonic acid the nitrogen-carbon bond of three-member rings might be broken at the crosslinking points of photosensitive polymer of cyclized poly isoprene-diazide system and then the broken photocrosslinking polymer was degradeted. The degradation products can dissolve in halogenated alkenes. The degradation rate of the photo-croaalinking products was dependent on the carbon chain size of alkyl group of alkyl benzene sulfonic acids and the reaction temperature. |
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| Keywords: | Alkyl benzene sulfonic acid Cyclized polyisoprene Diazidecompo- unds Photocrosslink Degradation reaction |
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