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Optical emission spectroscopy of argon-silane plasma |
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| Authors: | V. I. Strunin A. S. Demin G. Zh. Hudaibergenov |
| Affiliation: | (1) Department of Electronics and Computer Engineering, Joint Research Center of High-technology, Center for Hyper Media Research, Tokyo Polytechnic University, Atsugi 243-0297, Japan;(2) Department of Electronics and Computer Engineering, Joint Research Center of High-technology, Tokyo Polytechnic University, Atsugi 243-0297, Japan;(3) A.S.K Corporation, Tokyo 130-0002, Japan |
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