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Study of radiation damage on proton-bombarded GaP by PIXE |
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| Authors: | C. Ascheron R. Flagmeyer G. Otto J. Vogt H. U. Frey |
| Abstract: | On GaP single crystals bombarded with 0.3 MeV and 1.0 MeV protons the fluence and depth dependences of radiation damage are studied by means of particle induced X-ray emission spectrometry under chaneling conditions (PIXE-C) and the Rutherford backscattering/channeling technique (RBS-C). It is demonstrated that PIXE-C is suitable to study depth profiles of damage density by the combination with the bevelling technique. |
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