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基于激光回馈的波片在盘位相延迟测量系统
引用本文:李浩昊,张书练,谈宜东,李岩.基于激光回馈的波片在盘位相延迟测量系统[J].应用光学,2011,32(5):1003-1008.
作者姓名:李浩昊  张书练  谈宜东  李岩
作者单位:清华大学 精密测试技术及仪器国家重点实验室,北京 100084
基金项目:国家自然科学基金(60827006); 北京自然科学基金重点项目(09C0098)
摘    要: 利用激光回馈测量波片相位延迟精度高的优越性,以激光回馈技术为基础,实现光学波片的在盘测量,即在加工过程中,波片光胶于光胶盘的状态下测量波片位相延迟,以提高波片生产效率和成品率。采用凹面镜作为回馈镜以提高回馈信号调制深度,对激光回馈内、外腔长进行稳定,提高了系统可靠性;研究了波片与光胶盘光胶对波片测量的影响,提出并验证了在光胶盘上开孔,在打孔的光胶盘上光胶、加工、测量波片的新工艺,最终实现了波片在盘测量,测量长期重复性优于1°,经过激光频率分裂系统校正后,系统精度优于0.5°。

关 键 词:波片位相延迟  激光回馈  光胶盘

Wave plate phase retardation measurement on contact block based on optical feedback
LI Hao-hao,ZHANG Shu-lian,TAN Yi-dong,LI Yan.Wave plate phase retardation measurement on contact block based on optical feedback[J].Journal of Applied Optics,2011,32(5):1003-1008.
Authors:LI Hao-hao  ZHANG Shu-lian  TAN Yi-dong  LI Yan
Institution:State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China
Abstract:A technique to measure the phase difference of wave plate in the process of wave-plate production is introduced.It is based on the laser feedback method and achieves the 'on contact block' measurement,which means to measure the wave plate when it is bonded on the contact block.On the basis of achieving on contact block measurement,we studied the stabilization of laser cavity length,the influence of the radius of feedback mirror and the optical contact bonding layer.The system reaches the measurement uncerta...
Keywords:wave plate phase difference  laser feedback  contact block  
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