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Study of the optical properties of germanium films in the mid-IR spectral range
Authors:E N Kotlikov  V A Ivanov  V N Prokashev and A N Tropin
Institution:1.St. Petersburg State University of Aerospace Instrumentation,St. Petersburg,Russia;2.JSC Research Institute Girikond,St. Petersburg,Russia
Abstract:The optical properties of Si-doped germanium films have been investigated. It is shown that Ge films with 1.5 wt % Si have a minimum optical loss. The optical constants of Ge films have been measured at different substrate temperatures. The optimal conditions for producing films with minimum loss are determined.
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