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宏观放电参数对快原子态氮(N+,Nf)的影响
引用本文:张连珠. 宏观放电参数对快原子态氮(N+,Nf)的影响[J]. 计算物理, 2003, 20(5): 403-407
作者姓名:张连珠
作者单位:河北师范大学物理学院, 河北 石家庄 050016
基金项目:河北省自然科学基金(100064)资助项目
摘    要:采用氮直流辉光放电等离子体中快电子和重粒子(N2+,N+,Nf)混合的蒙特卡罗方法,模拟研究了快原子态粒子(N+,Nf)的产生率及轰击阴极的能量分布随宏观放电参数(P,V)的变化规律.结果表明,存在一最佳放电条件,使阴极壁处粒子(N+,Nf)的粒子数密度大且能量高;当电压大于800V时,轰击阴极的活性粒子(N+,Nf),主要由N2+-N2离解过程产生,电压小于300V时,主要由e--N2离解过程产生,模拟结果与实验结果相符合.

关 键 词:氮直流辉光放电  蒙特卡罗模拟方法  快原子态氮粒子  N2+-N2碰撞离解  
文章编号:1001-246X(2003)05-0403-05
收稿时间:2002-07-15
修稿时间:2002-07-15

Effects of Discharge Parameters upon Fast Atomic Species (N+,Nf)
ZHANG Lian-zhu. Effects of Discharge Parameters upon Fast Atomic Species (N+,Nf)[J]. Chinese Journal of Computational Physics, 2003, 20(5): 403-407
Authors:ZHANG Lian-zhu
Affiliation:College of Physics, Hebei Normal University, Shijiazhuang 050016, China
Abstract:Using a Combination of Monte Carlo models of fast electron and species (N2+,N+,Nf), the creation rates and the energy distributions of species (N+,Nf) at the cathode in nitrogen glow discharge under different discharge conditions are studied.It is shown that the total density of N+ and Nf depends on the creation rate of ions(N2+,N+) and the thermalization of Nf, and species(N+,Nf) bombarding negative wall is mainly produced by N2+-N2s dissociation at higher voltages,but mainly produced by e--N2s dissociation at lower voltages.
Keywords:nitrogen dc glow discharge  Monte Carlo simulation  fast nitrogen atomic species  N~+_2-N_2 dissociation collision
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