CURRENT TRENDS OF MICRO-AND NANOMECHANICS |
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| Authors: | Wanlin GuoHuiming XieQuanshui Zheng |
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| Affiliation: | Wanlin Guo(Institute of Nanoscience,Nanjing University of Aeronautics and Astronautics,Nanjing210016,China)Huiming Xie(AML,Department of Engineering Mechanics,Tsinghua University,Beijing 100084,China)Quanshui Zheng(Department of Engineering Mechanics,China) |
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| Abstract: | Introduction Scaling down to the micro- and nanoscale is a strong current trend in the development of science and technology. 'Small is energy efficient and cost effective' has long been for the motto of the semiconductor industry, including micro- and nanoelectronics, micro-electro-mechanical systems (MEMS) and nano- electro-mechanical systems (NEMS). But shrinking to small scales brings big challenges to traditional disciplines, including mechanics. |
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