八氟环丁烷等离子体聚合物结构的ESCA和IR表征

采用外部电极电容耦合的等离子体聚合装置,以Ar、N_2H_2和Hc为等离子气体,在不同功率、压力、等离子气体及等离子气体对单体比率的反应条件下,在辉光放电中进行八氟环丁烷聚合。用电子能谱(ESCA)和红外光谱(IR)法对聚合物结构进行表征。发现聚合物中存在C、F、Si、O、N和H等六种元素,并对可能存在的基团进行探讨。通过对ESCA(C_18 谱的分析,研究了聚合物支化与交联程度对反应条件的依赖关系,及其和聚合与刻蚀竞争历程之间存在的内在联系。

ESCA AND IR CHARACTERIZATION OF PLASMA-POLYMERIZED OCTAFLUOROCYCLOBUTANE STRUCTURE

In a capacitively coupled discharge with external electrodes, Ar, N2, H2 or He was used as plasma gas, polymerization of octafluorocyclobutane was carried out under different conditions by varying discharge power, pressure, plasma gas and plasma-gas/monomer ratio. Structure of polymerized products was characterized by IR spectroscopy and ESCA measurement. It was determined that there were six elements in the products, i.e. C, F, Si, O, N and H. The probably existed groups in the polymers were investigated. By analyzing the resolved peaks of C1 region in ESCA spectra, effect of the reaction conditions on degree of branching and cross-linking of the polymerized products was discussed.