A study of the reactivity of elemental Cr/Se/Te thin multilayers using X-ray reflectometry, in situ X-ray diffraction and X-ray absorption spectroscopy

The reactivity of [Cr/Se/Te] multilayers under annealing was investigated using X-ray reflectometry, in situ X-ray diffraction, X-ray absorption fine structure (XAFS) measurements and transmission electron microscopy. For all samples, interdiffusion was complete at temperatures between 100 and 300 °C, depending on the repeating tri-layer thickness. A crystalline phase nucleated approximately 20 °C above the temperature where interdiffusion was finished. The first crystalline phase in a binary Cr/Te sample was layered CrTe₃ nucleating at 230 °C. In ternary samples (Se:Te=0.6-1.2), the low-temperature nucleation of such a layered CrQ₃ (Q=Se, Te) phase is suppressed and instead the phase Cr₂Q₃ nucleates first. Interestingly, this phase decomposes around 500 °C into layered CrQ₃. In contrast, binary Cr/Se samples form stable amorphous alloys after interdiffusion and Cr₃Se₄ nucleates around 500 °C as the only crystalline phase. Evaluation of the XAFS data of annealed samples yield Se-Cr distances of 2.568(1) and 2.552(1) Å for Cr₂Q₃ and CrQ₃, respectively. In the latter sample, higher coordination shells around Se are seen accounting for the Se-Te contacts in the structure.