A new lateral shearing interferometer for precision surface measurement |
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| Authors: | X. Liu Y. Gao M. Chang |
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| Affiliation: | 1. The State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China;2. Department of Mechanical Engineering, Hong Kong University of Science and Technology, Hong Kong SAR, China;3. Department of Mechanical Engineering, Chung Yuan Christian University, Taiwan, China |
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| Abstract: | A new lateral shearing interferometer is proposed for precision surface measurement. In this shearing interferometer, a novel shear generator made of a single birefringence crystal plate is utilized. The shear adjustment is realized through the change of angle at which tested wavefront is incident into the crystal plate. By changing the orientation of the principal section of the plate, the generator can adjust the shearing direction. With the incident beam being circularly polarized, the generator can equalize the intensities of two shearing beams to make a good contrast interference pattern. The interferometer is simple and compact in terms of mechanism and has a complete common optical path structure. Phase shifting can be realized conveniently. The interferometer is insensitive to external vibrations and environmental disturbances, and hence has good stability and reliability with high measurement accuracy. To examine the performance of the proposed interferometer, experimental testing was conducted. High accuracy and repeatability are demonstrated. |
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