Calibration of optical systems for the measurement of microcomponents

Optical coherent techniques are well suited for the measurement of microcomponents but give accurate results only when calibrated systems are used. This paper presents a strategy for the calibration that involves at first the development of micromechanical reference components deforming in a reproducible retraceable and precise way when submitted to standard loadings. These reference materials are then used for the calibration of the measuring systems. Guidelines for building and measuring reference materials together with methods for evaluating the measurement uncertainty are presented.