Light stamping lithography: microcontact printing without inks |
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Authors: | Park Kyung S Seo Eun K Do Young R Kim Kwan Sung Myung M |
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Institution: | Department of Chemistry, Kookmin University,Chongnung-dong, Songbuk-ku, Seoul 136-702, Korea. |
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Abstract: | We report a new patterning method, called light-stamping lithography (LSL), that uses UV-induced adhesion of poly(dimethylsiloxane) (PDMS). LSL is based on the direct transfer of the contact surface of the PDMS stamp to a substrate via a UV (254 nm)-induced surface bonding between the stamp and the substrate. This procedure can be adopted in automated printing machines that generate patterns with a wide range of feature sizes on diverse substrates. To demonstrate its usefulness, the LSL method was applied to prepare several PDMS patterns on a variety of substrates. The PDMS patterns were then used as templates for selective deposition of TiO2 thin film using atomic layer deposition as well as resists for selective wet etching. |
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