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柔性液晶微透镜阵列的制备与性能研究
引用本文:刘鹏辉,李诗尧,王文雯,翁徐阳,吴朝兴,周雄图,张永爱. 柔性液晶微透镜阵列的制备与性能研究[J]. 光子学报, 2021, 0(3): 78-85
作者姓名:刘鹏辉  李诗尧  王文雯  翁徐阳  吴朝兴  周雄图  张永爱
作者单位:福州大学物理与信息工程学院
基金项目:国家自然科学基金(No.61775038);福建省自然科学基金(No.2019J01221)。
摘    要:针对集成成像视场角狭小的问题,设计并制备了一种柔性圆孔驱动电极控制液晶分子偏转的可弯曲和焦距可调的柔性液晶微透镜阵列.利用光刻技术在柔性ITO基板表面刻蚀并形成规则的圆孔阵列电极,旋涂工艺制备柔性聚酰亚胺(PI)膜层,PI膜层经60℃加热5 min后,再利用等离子体在功率630 W条件下处理5 min固化成PI取向层....

关 键 词:液晶  柔性微透镜  可控焦距  弯曲  光学性能

Preparation and Properties of Flexible Liquid Crystal Micro-lens Arrays
LIU Penghui,LI Shiyao,WANG Wenwen,WENG Xuyang,WU Chaoxing,ZHOU Xiongtu,ZHANG Yongai. Preparation and Properties of Flexible Liquid Crystal Micro-lens Arrays[J]. Acta Photonica Sinica, 2021, 0(3): 78-85
Authors:LIU Penghui  LI Shiyao  WANG Wenwen  WENG Xuyang  WU Chaoxing  ZHOU Xiongtu  ZHANG Yongai
Affiliation:(College of Physics and Information Engineering,Fuzhou University,Fuzhou 350108,China)
Abstract:A Flexible Liquid Crystal Micro-Lens Arrays(LC MLAs)with an adjustable focal length was designed and prepared to solve the narrow viewing angle of the integrated imaging.In this paper,the holepatterned driven-electrode arrays were fabricated by a photolithography technology and the flexible Polyimide(PI)film was prepared by a spin coating method on the flexible ITO glass substrate.After the PI film layer was heated at 60°C for 5 min,the PI orientation layer was formed by using the plasma at a power of 630 W for 5 minutes.The optical properties of LC MLAs with a flat substrate and a curvature radius of 7.5cm were studied after the LC MLAs were fabricated.The experimental results show that the prepared LC MLAs can achieve the excellent focusing properties under the condition of a flat plate and a curvature radius of 7.5 cm.The interference patterns are uniform and the focal radius are small when the operating voltages are applied to the LC MLAs.Further,the focal length of the flexible LC MLAs with the curvature radius of 7.5 cm can be tunable from 0.43 mm to 1.05 mm when the operating voltages are changed from 3 Vrms to 5.3 Vrms.
Keywords:Liquid crystal  Flexible micro-lens  Controllable focal length  Bendable  Optical performance
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