| 钛酸锶钡(BST)薄膜的制备与应用研究进展 |
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| 引用本文： | 符春林,杨传仁,陈宏伟,胡文成,李文远.钛酸锶钡(BST)薄膜的制备与应用研究进展[J].电子元件与材料,2003,22(5):47-50. |
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| 作者姓名： | 符春林 杨传仁 陈宏伟 胡文成 李文远 |
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| 作者单位： | 电子科技大学微电子与固体电子学院,四川,成都,610054 |
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| 摘 要： | 介绍了钛酸锶钡(BST)薄膜的四种制备方法(脉冲激光沉积、磁控溅射、溶胶–凝胶、金属有机化学气相沉积)及BST薄膜在介质移相器、动态随机存储器、热释电红外探测器、H2探测器中的应用等方面的研究进展。提出了需进一步开展的研究课题如:晶粒晶界控制、界面控制、漏电导机制、疲劳机制、非线性效应及大面积高质量薄膜的制备技术等。
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| 关 键 词： | 钛酸锶钡 铁电薄膜 制备技术 |
| 文章编号： | 1001-2028(2003)05-0047-04 |
The Progress of Research on the Film of Barium Strontium Titanate: Preparations and Applications |
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| FU Chun-lin,YANG Chuan-ren,CHEN Hong-wei,HU Wen-cheng,LI Wen-yuan.The Progress of Research on the Film of Barium Strontium Titanate: Preparations and Applications[J].Electronic Components & Materials,2003,22(5):47-50. |
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| Authors: | FU Chun-lin YANG Chuan-ren CHEN Hong-wei HU Wen-cheng LI Wen-yuan |
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| Abstract: | The progress of the research on the film of barium strontium titanate (BST) is reviewed. Included are the four preparation methods PLD, magnetron sputtering, sol-gel and MOCVD, and its application in phase shifter, DRAM, pyroelectric infrared sensor and hydrogen gas sensor. The subjects that need further research are control of crystal grain boundary, control of interface, leakage conductance mechanism, fatigue mechanism, non-linear effect, preparation technology for the film of high quality and large area, etc. |
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| Keywords: | barium strontium titanate ferroelectric thin film preparation technology applications |
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