光学元件损伤的暗场检测方法研究

基于菲涅耳衍射理论与4f系统的傅立叶变换性质,研究了光学系统中多元件存在损伤时,其它元件的损伤对被测光学元件损伤的暗场检测影响。通过对不同种类、不同尺度及不同距离的典型损伤频谱特征的计算和实验研究发现,当其它元件距离被测元件足够远或损伤尺度足够大时,它们的暗场强度分布不会影响被测元件上的损伤检测,这对强激光系统的光学元件损伤检测有参考意义。

Research of Optics damage inspection from its dark-field method

According to the Fresnel diffraction theory and the Fourier transform character of the 4f system,the influence of other optics damage on the inspection of the tested optics damage using dark-field method is studied.The spectral structure of the different categories of optical inspection,dimensions aod distances from the tested optics damage is analyzed.The simulation and experimental result show that the damages on the other optics will not affect the inspection of damages on the tested element,when they are separated away far enough from the tested element or damage dimensions are large enough.It is helpful for optical element damage inspection in high energy laser system.