| 发射光谱法测定ITO透明导电膜的Sn／In |
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| 引用本文： | 郭庆林,杨志平.发射光谱法测定ITO透明导电膜的Sn／In[J].光谱学与光谱分析,1998,18(1):67-69. |
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| 作者姓名： | 郭庆林 杨志平 |
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| 作者单位： | [1]河北大学物理系 [2]河北大学固体发光研究室 |
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| 摘 要： | 本文采用运动电极，火花激发，讨论了膜样品分析中标样和分析样品的一致性，介绍了选用多个样品叠加摄谱对ＩＴＯ膜中Ｓｎ／Ｉｎ浓度比的测量。结果表明分析方法的精密度和准确度满足分析要求。
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| 关 键 词： | 发射光谱法 ITO透明导电膜 ITO膜 锡铟浓度比 |
DETERMINATION OF Sn/In IN THE ITO FILM BY EMISSION SPECTRAL METHOD |
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| Q Guo,J Zhang,Z Yang.DETERMINATION OF Sn/In IN THE ITO FILM BY EMISSION SPECTRAL METHOD[J].Spectroscopy and Spectral Analysis,1998,18(1):67-69. |
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| Authors: | Q Guo J Zhang Z Yang |
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| Institution: | Department of Physics, Hebei University, 071002 Baoding. |
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| Abstract: | In the film sample analysis, the consstence within standard sample and analytical sample is discussed by emission spectral method. Using spark light source and moving electrode, the content of Sn/In in the ITO film is obtained by repeatedly exposing four samples. The accuracy and precision are satisfying. |
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| Keywords: | Emission spectral method ITO film |
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