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Designing a non-volatile imaging switch for mass-persistent,chemically amplified photolithography: a model study |
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| Authors: | Klopp John M Bensel Nicolas Fresco Zachary M Fréchet Jean M J |
| Affiliation: | Department of Chemistry, University of California, Berkeley, CA 94720-1460, USA. |
| Abstract: | An acid catalysed rearrangement that transforms a bicyclic lactone into a phenolic carboxylic acid has been tested for potential use in chemically amplified microlithographic imaging. |
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