Patterning of Aluminium thin film on polyethylene terephthalate by multi-beam picosecond laser |
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| Institution: | 1. Laser Group, Department of Engineering, University of Liverpool, L69 3GQ, UK;2. The Wolfson Centre for Materials Processing, Brunel University, Uxbridge, Middlesex UB8 3PH, UK;3. Nanoinvestigation Centre at Liverpool, University of Liverpool, L69 3GQ, UK;1. Department of Electrical and Computer Engineering, McGill University, 3480 University St., Montreal, Quebec H3A 0E9, Canada;2. Department of Electrical Engineering, Qatar University, PO Box 2713, Doha, Qatar;1. College of Science, Donghua University, Shanghai 201620, China;2. State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Materials Science and Engineering, Donghua University, Shanghai 201620, China;1. Ceramic Matrix Products Division, Analytical, Spectroscopy and Ceramics Group, PCM Entity, Vikram Sarabhai Space Centre, Thiruvananthapuram 695022, India;2. Analytical and Spectroscopy Division, Analytical, Spectroscopy and Ceramics Group, PCM Entity, Vikram Sarabhai Space Centre, Thiruvananthapuram 695022, India |
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| Abstract: | High speed patterning of a 30 nm thick Aluminium thin film on a flexible Polyethylene Terephthalate substrate was demonstrated with the aid of Computer Generated Holograms (CGH׳s) applied to a phase only Spatial Light Modulator. Low fluence picosecond laser pulses minimise thermal damage to the sensitive substrate and thus clean, single and multi-beam, front side thin film removal is achieved with good edge quality. Interestingly, rear side ablation shows significant Al film delamination. Measured front and rear side ablation thresholds were Fth=0.20±0.01 J cm−2 and Fth=0.15±0.01 J cm−2 respectively. With laser repetition rate of 200 kHz and 8 diffractive spots, a film removal rate of R>0.5 cm2 s−1 was demonstrated during patterning with a fixed CGH and 5 W average laser power. The effective laser repetition rate was feff~1.3 MHz. The application of 30 stored CGH׳s switching up to 10 Hz was also synchronised with motion control, allowing dynamic large area multi-beam patterning which however, slows micro-fabrication. |
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| Keywords: | Picosecond laser Spatial light modulator Ablation Computer Generated Hologram Thin film patterning |
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