Femtosecond laser processing of indium-tin-oxide thin films |
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Affiliation: | 1. School of Materials Engineering, Jiangsu University of Technology, Changzhou 213001, PR China;2. Mechanical Department, Changzhou Vocational Institute of Light Industry, Changzhou 213164, PR China |
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Abstract: | Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of ~1.4 μm, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width ~900 nm, i.e. ~1/8 of the focused beam׳s diameter (7 μm at 1/e2). |
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Keywords: | Femtosecond laser Indium-tin-oxide Crystallization Nano-scale |
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