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A phase-stepped spectroscopic ellipsometer |
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| Affiliation: | 1. Institute of Photonics and Electronics, Academy of Sciences of the Czech Republic, Chaberská 57, 182 51 Prague 8, Czech Republic;2. Institute of Rock Structure and Mechanics AS CR, V. Holesovickach 41, 182 09 Prague 8, Czech Republic |
| Abstract: | |
| Keywords: | Spectroscopic ellipsometry Phase stepping Thin films |
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