Using higher steps phase-shifting algorithms and linear least-squares fitting in white-light scanning interferometry |
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| Affiliation: | 1. Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan 30013, ROC;2. Instrument Technology Researcher Center, National Applied Research Laboratories, Hsinchu, Taiwan, ROC;1. School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China;2. Faculty of Science, Jiangsu University, Zhenjiang 212013, China;1. School of Engineering, Huzhou University, Huzhou 313000, Zhejiang, China;2. Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200072, China;1. Guangdong Provincial Key Laboratory of Nanophotonic Functional Materials and Devices, South China Normal University, Guangzhou 510006, China;2. College of Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China;1. School of Opto-Electronics, Beijing Institute of Technology, Beijing 100081, China;2. Key Laboratory for Mechanics in Fluid Solid Coupling Systems, Institute of Mechanics, Chinese Academy of Science, Beijing 100190, China;1. Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan, ROC;2. Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu 30076, Taiwan, ROC |
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| Abstract: | White-light scanning interferometry (WLSI) has been a well-established tool for measuring the profile of objects. Since the white-light source is continuous in spectrum, the phase ambiguity problem can be avoided. Specimens with discontinuous profile can therefore be possibly measured by WLSI. In this paper, using higher steps, i.e. nine and eleven steps, phase-shifting algorithms (PSAs) based on local linear conditions of envelope function were proposed. The actual zero optical path difference position was retrieved by extracting the phase value and phase compensation. Maximum intensity peak positions at five points were used to calculate the center wavelength of the light source by both phase unwrapping and linear least-squares fitting. Both simulated and experimental results showed that the proposed nine- and eleven-step PSAs have good linearity and robustness to accurately measure the profile and center wavelength of the light source. |
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| Keywords: | Phase-shifting algorithm Linear least-squares fitting Local linear condition Micro-profile measurement White-light scanning Interferometry |
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