| Growth Feature of Cubic Boron Nitride on c-BN Crystal Substrates |
| |
| 引用本文： | 杨大鹏 苏作鹏 杜勇慧 吉晓瑞 杨旭昕 宫希亮 张铁臣. Growth Feature of Cubic Boron Nitride on c-BN Crystal Substrates[J]. 中国物理快报, 2006, 23(5): 1324-1326 |
| |
| 作者姓名： | 杨大鹏 苏作鹏 杜勇慧 吉晓瑞 杨旭昕 宫希亮 张铁臣 |
| |
| 作者单位： | National Laboratory of Superhard Materials, dilin University, Changchun 130023 |
| |
| 摘 要： | Cubic boron nitride （c-BN） films were deposited on highly-oriented （111） bulk c-BN crystal by using the rf magnetron sputtering method. The growth films are characterized by micro-Raman spectroscopy （μ-RS） and scanning electron microscopy （SEM）, The results show that the high crystallization electron transparent c-BN films in thickness of about 10μm are obtained, Island and step growth models are clearly shown.
|
| 关 键 词： | 生长特性 立方硼氮化物 晶体结构 生长薄膜 |
| 收稿时间： | 2005-12-30 |
| 修稿时间： | 2005-12-30 |
Growth Feature of Cubic Boron Nitride on c-BN Crystal Substrates |
| |
| YANG Da-Peng, SU Zuo-Peng, DU Yong-Hui, JI Xiao-Rui, YANG Xu-Xin, GONG Xi-Liang, ZHANG Tie-Chen. Growth Feature of Cubic Boron Nitride on c-BN Crystal Substrates[J]. Chinese Physics Letters, 2006, 23(5): 1324-1326 |
| |
| Authors: | YANG Da-Peng SU Zuo-Peng DU Yong-Hui JI Xiao-Rui YANG Xu-Xin GONG Xi-Liang ZHANG Tie-Chen |
| |
| Affiliation: | National Laboratory of Superhard Materials, Jilin University, Changchun 130023 |
| |
| Abstract: | |
| |
| Keywords: | |
| 本文献已被 维普 等数据库收录！ |
