|
|||||
|
|
PHOTOLUMINESCENCE OF NANOCRYSTALLINE SiC FILMS PREPARED BY RF MAGNETRON SPUTTERING |
|
| Authors: | Liu Ji-wen Xie Fang-qing Zhong Ding-yong Wang En-ge Liu Wen-xi Li Shun-feng and Yang Hui |
| Institution: | State Key Laboratory for Surface Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China; School of Materials Science and Engineering, Tianjin University, Tianjin 300072, China; National Research Center for Optoelectronic Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
| Abstract: | Amorphous SiC films are deposited on Si (111) substrates by rf magnetron sputtering and then annealed at 1200℃ for different times by a dc self-heating method in a vacuum annealing system. The crystallization of the amorphous SiC is determined by Raman scattering at room temperature and X-ray diffraction. The experimental result indicates that the SiC nanocrystals have formed in the films. The topography of the as-annealed films is characterized by atomic force microscopy. Measurements of photoluminescence of the as-annealed films show blue or violet light emission from the nanocrystalline SiC films and photoluminescence peak shifts to short wavelength side as the annealing time decreases. |
| Keywords: | luminescence SiC nanocrystalline film rf sputtering |
| 点击此处可从《中国物理 B》浏览原始摘要信息 | |
| 点击此处可从《中国物理 B》下载免费的PDF全文 | |