Resonator fabrication for cavity enhanced, tunable Si/Ge quantum cascade detectors |
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| Authors: | M Grydlik P Rauter T Fromherz G Bauer C Falub D Gruetzmacher G Isella |
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| Institution: | aInstitute for Semiconductor and Solid State Physics, University of Linz, Austria;bPaul Scherrer Institute, Villigen PSI, Switzerland;cPolitecnico di Milano, Como, Italy |
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| Abstract: | The detectivity of tunable SiGe quantum cascade injector structures designed for detection in the mid-infrared (MIR) spectra region, can be switched between two bands centered around 6 and  by reversing the sign of the externally applied bias voltage. In order to enhance detectivity of these devices and restrict the response to narrower spectral bands, a process for integrating them into a vertical resonator cavity has been developed. The process is based on a low temperature  etch mask deposition and, therefore, is applicable for these novel Quantum Well Infrared Photodetector (QWIP) structures grown by low temperature Si MBE. |
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| Keywords: | SiGe QWIP TMAH etching Resonator enhanced photodetection |
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