| 静电偏转场边缘区均匀性改善措施 |
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| 引用本文： | 刘希举,刘清前.静电偏转场边缘区均匀性改善措施[J].山东大学学报(理学版),1988(1). |
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| 作者姓名： | 刘希举 刘清前 |
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| 作者单位： | 山东大学物理系，山东大学物理系 |
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| 摘 要： | 本文给出了不同情况下静电偏转系统中的等位面分布。讨论中提出了一些改善静电偏转场边缘区均匀性的建议。
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| 关 键 词： | 电子光学 静电偏转场 象差 |
THE MEASURES TO IMPROVE UNIFORMITY OF THE PERIPHERY OF ELECTROSTATIC DEFLECTION FIELD |
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| Liu Xiju and Liu Qingqian.THE MEASURES TO IMPROVE UNIFORMITY OF THE PERIPHERY OF ELECTROSTATIC DEFLECTION FIELD[J].Journal of Shandong University,1988(1). |
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| Authors: | Liu Xiju and Liu Qingqian |
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| Institution: | Department of Phyiscs |
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| Abstract: | The distributions of equipotential surface in electrostatic deflection system under different cases are given in this paper. Some suggestions to improve uniformity of the periphery of electrostatic deflection field are outlined in the discussion. |
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| Keywords: | electron optics electrostatic deflection field aberration |
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