Lens Sag Measurement of Microlens Array Using Optical Interferometric Microscope |
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Authors: | Shih-Wei Yang Chern-Sheng Lin Shu-Hsien Fu Mau-Shiun Yeh Chingfu Tsou Teng-Hsien Lai |
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Affiliation: | 1. Department of Electrical Engineering, Feng Chia University. Taichung, Taiwan;2. Department of Automatic Control Engineering, Feng Chia University. Taichung, Taiwan;3. Chung-Shan Institute of Science & Technology, Lung-Tan, Tao-Yuan, Taiwan;1. imec vzw, Kapeldreef 75, B-3001 Leuven, Belgium;2. KULeuven, Department of Electrical Engineering (ESAT), Kasteelpark Arenberg 10, B-3001 Leuven, Belgium;3. Institute for Molecular Engineering, University of Chicago, 5747 South Ellis Avenue, Jones 217, Chicago, IL 60637, USA;4. AZ Electronic Materials, 70 Meister Avenue, Branchburg, NJ 08876, USA;1. Department of ECE, University College of Engineering, Nagercoil - 629004, Tamilnadu, India;2. Department of Physics, Annapoorana Engineering College, Salem, Tamilnadu, India;3. Department of Physics, Chikkanna Government Arts College, Tiruppur, Tamilnadu, India;4. Department of Physics, Government Arts College, Salem, Tamilnadu, India;5. Department of Physics, University College of Engineering, Nagercoil - 629004, Tamilnadu, India |
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Abstract: | This study attempted to develop a detection system for lens sag of the microlens array in real time using an optical automatic inspection framework to link with the computer through a camera. An image processing technique was applied to detect the spherical microlens array, and then, the results were compared.The system light source used laser light and applied CCD to collocate with the microscope array to form an automatic optical detection system for an optical interferometric microscope. It applied the principle of the Fizeau interferometer, illuminated the surface of microlens array, and formed the phase difference required by the interference of two lights through the laser light reflected by the reference plane and the surface of the microlens array, thus, forming an interference fringe.When the sag of the microlens was much longer than the wave length of the detection light source, the fringe would be densely distributed, thus, only a few central fringes were clear in the microscopic image. An image processing method was used to search the center of the interference fringe and a creative algorithm was utilized to obtain the lens sag of the microlens. As proved by the experiment, lens sag of 4 microlens arrays were detected in real time, with a minimum detection error of 0.08 μm, and a maximum detection error of 4 μm (error value 1 ~ 9%), according to different sample processes. This system featured a simple structure and is applicable to non-contact detection and detection of different-sized microlens arrays. |
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