Fabrication and characterization of polydimethylsiloxane concave microlens array |
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| Authors: | Li Feng Chen Sihai Luo Huan Zhou Yifan Lai Jianjun Gao Yiqing |
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| Institution: | 1. Key Laboratory of Nondestructive Test (Chinese Ministry of Education), Nanchang Hangkong University, Nanchang 330063, China;2. Wuhan National Laboratory for Optoelectronics, College of Optoelectronic Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China;3. College of Automation Engineering, Nanjing University of Aeronautics and Astronautics, Yudao Road, Nanjing 210016, China |
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| Abstract: | Concave microlens array is fabricated with PDMS (polydimethylsiloxane) material. Resist thermal reflow method and reverse pattern replication method are employed to fabricate the concave microlens array. The optical performance of the PDMS concave microlens array is analyzed with ray-trace method. Profile of the PDMS concave microlens array is observed by metallographic microscope and Talystep. It is indicated by the results that the surface profile of the PDMS concave microlens array is clear and distinct. Optical properties are also tested with Beamprofiler system. The shine spots on the focal plane of the microscope objective are of highly uniformity, and essentially coincide well with the simulation result. The PDMS concave microlens array has potential application in many optoelectronic devices, such as diffusers and scanners. |
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