Spectroscopic ellipsometry measurements on an anisotropic crystal: 6H-SiC |
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Authors: | Zheng Ma Jie Lian Qing-Pu Wang Wen-Li Guan Shi-Liang Wu Shang Gao Ping Song Xiao Wang |
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Affiliation: | 1. School of Information Science and Engineering, Shandong University, Jinan 250100, China;2. Physics Department of Qilu Normal University, Jinan, Shandong 250013, China |
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Abstract: | In spectroscopic ellipsometry (SE) measurement, accuracy of optic axis orientation is very important requirement. To reduce the error arising from the uncertainty in optic axis orientation, we applied multiple angles SE measurement performed on 6H-SiC with the optical axis perpendicular to the sample (0 0 0 1) surface in the 300–800 nm wavelength range at room temperature. The refractive indices and extinction coefficients for ordinary and extraordinary were both fitted by Cauchy dispersion model. The obtained results were of great agreement with literatures. |
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