| 高质量多孔氧化铝模板的制备 |
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| 引用本文： | 刘凯, 杜凯, 陈静, 等. 高质量多孔氧化铝模板的制备[J]. 强激光与粒子束, 2010, 22(07). |
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| 作者姓名： | 刘凯 杜凯 陈静 周兰 张林 方瑜 |
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| 作者单位： | 1.中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621 900 |
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| 摘 要： | 在草酸电解液中研究了阳极氧化法制备多孔氧化铝模板（AAO模板)。采用场发射扫描电子显微镜对多孔模板的形貌进行表征，结果表明：模板孔的分布均匀有序，孔径在40～70 nm；电解液浓度、氧化电压、氧化温度和氧化时间都会影响模板的形态；不经过高温退火及抛光也可以制得规则排布的多孔AAO模板。X射线衍射分析表明：氧化铝膜的主要成分为非晶态Al2O3/sub>。
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| 关 键 词： | 草酸 阳极氧化 阳极氧化铝模板 纳米结构 |
Fabrication of high quality ordered porous anodic aluminum oxide templates |
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| liu kai, du kai, chen jing, et al. Fabrication of high quality ordered porous anodic aluminum oxide templates[J]. High Power Laser and Particle Beams, 2010, 22. |
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| Authors: | liu kai du kai chen jing zhou lan zhang lin fang yu |
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| Affiliation: | 1. Research Center of Laser Fusion,CAEP,P.O.Box 919-987,Mianyang 621900,China |
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| Abstract: | The preparation of porous anodic aluminum oxide (AAO) templates has been studied with oxalic acid as electrolyte. The morphology of the as-prepared templates has been characterized by field-emission scanning electron microscope (FE-SEM). The pores distributed orderly and uniformly with the diameter ranging from 40 nm to 70 nm. The experimental results indicate that electrolyte concentration, oxidation voltage, oxidation temperature and oxidation time affect the structure of AAO templates. Ordered porous AAO templates can be derived without annealing and finishing. X-ray diffraction (XRD) analysis indicates that the aluminum oxide film is mainly composed of amorphous Al2O3/sub>. |
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| Keywords: | oxalic acid anodic oxidation anodic aluminum oxide template nanostructure |
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