| 正入射软X-射线显微成像系统聚光镜设计 |
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| 引用本文： | 王占山 曹健林. 正入射软X-射线显微成像系统聚光镜设计[J]. 强激光与粒子束, 1998, 10(1): 30-34 |
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| 作者姓名： | 王占山 曹健林 |
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| 作者单位： | 中国科学院长春光学精密机械研究所, 应用光学国家重点实验室, 长春, 130022 |
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| 基金项目： | 国家自然科学基金,吉林省科委青年基金 |
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| 摘 要： | 依据正入射软X 射线显微成像系统对聚光镜的要求, 论述了采用掠入射聚光镜是最佳选择。在分析聚光镜几何参数的基础上, 决定了确定椭球面聚光镜的方法。在考虑材料反射特性和实际制作椭球面镜方法的同时, 确定了要研制的高分辨率显微成像系统用聚光镜的结构参数。
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| 关 键 词： | 软X-射线 显微成像系统 聚光镜 掠入射 |
| 收稿时间： | 1900-01-01; |
DESIGN OF THE CONDENSER FOR SOFT X RAY NORMAL INCIDENCE MICROSOPIC OPTICS |
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| Wang Zhanshan,Cao Jianlin,Chen Xingdan The State Key Laboratory of Applied Optics. DESIGN OF THE CONDENSER FOR SOFT X RAY NORMAL INCIDENCE MICROSOPIC OPTICS[J]. High Power Laser and Particle Beams, 1998, 10(1): 30-34 |
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| Authors: | Wang Zhanshan Cao Jianlin Chen Xingdan The State Key Laboratory of Applied Optics |
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| Affiliation: | The State Key Laboratory of Applied Optics; Institute of Optics and Fine Mechanics Chinese Academy of Science Changchun 130022; |
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| Abstract: | The optimum choice of grazing incidence on the basis of the demands soft X ray normal incidence microscopic optics is presented. The methods determined the elliptical condenser was carried out according to analyzing the geometric parameters of condenser. The structure of the condenser for soft X ray normal incidence microscopic optics was completed considering the reflective performance of materials and the techniques of the condenser. |
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| Keywords: | soft X ray microscopic optics condenser grazing incidence |
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